This etching is anisotropic due to the varying etching rates of the modied region and pristine glass . The modied region can be etched entirely away in just a few minutes. Subsequently, a hemispherical cave is formed on the glass surface through continuous isotropic etching initiated from the micro pit, as shown in Fig. A2a.
Based on our discovery of a new phenomenon, where laser modified-lines transform isotropic pristine glass etching to an anisotropic process guided by directions along modified tracks, we develop a laser-guided anisotropic etching (LGAE) method, presenting a significant advancement in the efficient fabrication of micro-engineered glass components.
The initial laser-machined arc profile is fully etched away during the isotropic etching and does not affect the final shape. At the same time, the steady and continuous laser-guided anisotropic etching can create V-shape tips with stable angles, guaranteeing shape accuracy and thus confirming the robustness of the LGAE method.
This phenomenon can be explained according to the quasi-anisotropic etching mechanism, as shown in Fig. 5e. The etching of the glass and the interfacial layer is isotropic in nature at the microscopic level. Therefore, the contour lines of the etched morphology are composed of isotropic etching tangents at different points.
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